- 专利标题: Hybrid electrically erasable programmable read-only memory (EEPROM) systems and methods for forming
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申请号: US15624886申请日: 2017-06-16
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公开(公告)号: US10038001B1公开(公告)日: 2018-07-31
- 发明人: Yigong Wang
- 申请人: Allegro Microsystems, LLC
- 申请人地址: US NH Manchester
- 专利权人: Allegro Microsystems, LLC
- 当前专利权人: Allegro Microsystems, LLC
- 当前专利权人地址: US NH Manchester
- 代理机构: Daly, Crowley, Mofford & Durkee, LLP
- 主分类号: H01L27/115
- IPC分类号: H01L27/115 ; H01L27/11521 ; H01L27/11558
摘要:
Systems, methods, and techniques described here provide for a hybrid electrically erasable programmable read-only memory (EEPROM) that functions as both a single polysilicon EEPROM and a double polysilicon EEPROM. The two-in-one hybrid EEPROM can be programmed and/or erased as a single polysilicon EEPROM and/or as a double polysilicon EEPROM. The hybrid EEPROM memory cell includes a programmable capacitor disposed on a substrate. The programmable capacitor includes a floating gate forming a first polysilicon layer, an oxide-nitride-oxide (ONO) layer having disposed over a first surface of the floating gate, and a control gate forming a second polysilicon layer with the control gate formed over a first surface of the ONO layer to form a hybrid EEPROM having a single polysilicon layer and a double polysilicon EEPROM. The single polysilicon EEPROM includes the first polysilicon layer and the double polysilicon EEPROM includes the first and second polysilicon layers.
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