Invention Grant
- Patent Title: Identification of a seal failure in MEMS devices
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Application No.: US15258720Application Date: 2016-09-07
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Publication No.: US10041854B2Publication Date: 2018-08-07
- Inventor: Luca Coronato , Giacomo Gafforelli , Adolfo Giambastiani
- Applicant: PANASONIC CORPORATION
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Main IPC: G01P1/02
- IPC: G01P1/02 ; G01P15/08 ; G01M3/26 ; G01C19/5776 ; G01C19/5783

Abstract:
A microelectromechanical sensor (MEMS) package includes a gyroscope and an accelerometer. The gyroscope is located within a low-pressure cavity that is sealed from an external pressure. The accelerometer is located within a cavity, and the seal for the accelerometer cavity is entirely within the gyroscope cavity. Under normal operating conditions, the accelerometer seal holds the accelerometer cavity at a higher pressure than the pressure of the enclosing gyroscope cavity. In the event that one of the gyroscope seal or the accelerometer seal is broken, the gyroscope senses the change in pressure and a failure is identified.
Public/Granted literature
- US20170167945A1 IDENTIFICATION OF A SEAL FAILURE IN MEMS DEVICES Public/Granted day:2017-06-15
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