- Patent Title: Method and apparatus for dynamic alignment of semiconductor devices
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Application No.: US14017358Application Date: 2013-09-04
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Publication No.: US10041973B2Publication Date: 2018-08-07
- Inventor: Nee Wan Khoo , Horst Groeninger
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Murphy, Bilak & Homiller, PLLC
- Main IPC: H01L21/68
- IPC: H01L21/68 ; G01R1/04 ; H01L23/00

Abstract:
A semiconductor device is aligned by placing the semiconductor device in a nest between first and second sections of the nest when the nest is in a receiving position in which the first and second sections are spaced further apart from one another than when the nest is in an aligning position. The nest is moved from the receiving position to the aligning position with the semiconductor device in the nest so that the first and second sections are spaced closer to one another and align the semiconductor device in the nest. The semiconductor device is removed from the nest after the semiconductor device is aligned.
Public/Granted literature
- US20150063969A1 Method and Apparatus for Dynamic Alignment of Semiconductor Devices Public/Granted day:2015-03-05
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