- 专利标题: Gimbal assembly test system and method
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申请号: US15014479申请日: 2016-02-03
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公开(公告)号: US10041976B2公开(公告)日: 2018-08-07
- 发明人: David L. Gardell , David M. Audette , Peter W. Neff
- 申请人: GLOBALFOUNDRIES INC.
- 申请人地址: KY Grand Cayman
- 专利权人: GLOBALFOUNDRIES INC.
- 当前专利权人: GLOBALFOUNDRIES INC.
- 当前专利权人地址: KY Grand Cayman
- 代理机构: Hoffman Warnick LLC
- 代理商 Michael LeStrange
- 主分类号: G01R1/073
- IPC分类号: G01R1/073 ; G01R33/00 ; G01R35/00 ; G01R31/24 ; G01R31/44 ; G01R31/26
摘要:
Aspects of the present disclosure provide a gimbal assembly test system including: a protective cover affixed to a test surface of a wafer probe card mounted within a gimbal bearing, wherein the protective cover includes an exterior surface oriented outward from the test surface of the wafer probe card; and a recess extending into the exterior surface of the protective cover and shaped to matingly engage a load cell tip therein.
公开/授权文献
- US20170219626A1 GIMBAL ASSEMBLY TEST SYSTEM AND METHOD 公开/授权日:2017-08-03
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