In some embodiments of the disclosed subject matter provides an active matrix organic light emitting diode array substrate, comprising; multiple pixel units in an array on a base substrate, adjacent pixel units are separated by a pixel defining layer, each pixel unit comprises a thin film transistor and an organic light emitting diode; an insulating layer between a source/drain electrode layer of the thin film transistor and an electrode layer of the organic light emitting diode; the insulating layer includes a via hole therein, the electrode layer comprises a recess part connecting with the source/drain electrode layer in the via hole; and a filling layer on the recess part for preventing an organic light emitting layer of the organic light emitting diode being inside of the recess part, the pixel defining layer and an organic light emitting layer of the organic light emitting diode are overlaid on the filling layer.