Invention Grant
- Patent Title: Multi-device flexible electronics system on a chip (SOC) process integration
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Application No.: US15121759Application Date: 2014-03-27
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Publication No.: US10050015B2Publication Date: 2018-08-14
- Inventor: Ravi Pillarisetty , Sansaptak Dasgupta , Niloy Mukherjee , Brian S. Doyle , Marko Radosavljevic , Han Wui Then
- Applicant: Ravi Pillarisetty , Sansaptak Dasgupta , Niloy Mukherjee , Brian S. Doyle , Marko Radosavljevic , Han Wui Then
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- International Application: PCT/US2014/032037 WO 20140327
- International Announcement: WO2015/147835 WO 20151001
- Main IPC: H01L29/10
- IPC: H01L29/10 ; H01L29/12 ; H01L25/065 ; H01L25/00 ; H01L29/20 ; H01L29/24 ; G06F1/16 ; G09F9/30 ; G09G3/36 ; H01L21/8258 ; H01L23/14 ; H01L23/15 ; H01L23/498 ; H01L21/822 ; H01L27/06

Abstract:
Embodiments of the present disclosure describe multi-device flexible systems on a chip (SOCs) and methods for making such SOCs. A multi-material stack may be processed sequentially to form multiple integrated circuit (IC) devices in a single flexible SOC. By forming the IC devices from a single stack, it is possible to form contacts for multiple devices through a single metallization process and for those contacts to be located in a common back-plane of the SOC. Stack layers may be ordered and processed according to processing temperature, such that higher temperature processes are performed earlier. In this manner, intervening layers of the stack may shield some stack layers from elevated processing temperatures associated with processing upper layers of the stack. Other embodiments may be described and/or claimed.
Public/Granted literature
- US20170069596A1 MULTI-DEVICE FLEXIBLE ELECTRONICS SYSTEM ON A CHIP (SOC) PROCESS INTEGRATION Public/Granted day:2017-03-09
Information query
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