Invention Grant
- Patent Title: Laser crystallization apparatus and method of driving the same
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Application No.: US15442407Application Date: 2017-02-24
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Publication No.: US10050067B2Publication Date: 2018-08-14
- Inventor: Jong-Oh Seo , Dong-Min Lee , Mee-Jae Kang , Sang-Ho Jeon
- Applicant: Samsung Display Co., Ltd
- Applicant Address: KR
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR
- Agency: Innovation Counsel LLP
- Priority: KR10-2016-0084706 20160705
- Main IPC: H01L27/12
- IPC: H01L27/12 ; G02B27/09

Abstract:
A laser crystallization apparatus includes a laser generating module configured to generate a laser beam, an optical module configured to guide the laser beam, an annealing chamber comprising a stage on which a target substrate comprising an amorphous thin film formed therein is disposed, the stage being movable along an X-axis direction and a Y-axis direction, and a tilt refractive lens configured to transform the laser beam having a cross-sectional area of a rectangle shape into a tilted laser beam having a cross-sectional area of a non-rectangular parallelogram shape and to irradiate the tilted laser beam perpendicular to the stage.
Public/Granted literature
- US20180012914A1 LASER CRYSTALLIZATION APPARATUS AND METHOD OF DRIVING THE SAME Public/Granted day:2018-01-11
Information query
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