- 专利标题: Metal gate structure and manufacturing method thereof
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申请号: US15358061申请日: 2016-11-21
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公开(公告)号: US10056299B2公开(公告)日: 2018-08-21
- 发明人: Wei-Shuo Ho , Tsung-Yu Chiang , Kuang-Hsin Chen
- 申请人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- 申请人地址: TW Hsinchu
- 专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- 当前专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- 当前专利权人地址: TW Hsinchu
- 代理机构: WPAT, P.C., Intellectual Property Attorneys
- 代理商 Anthony King
- 主分类号: H01L21/8234
- IPC分类号: H01L21/8234 ; H01L29/78 ; H01L21/02 ; H01L21/283 ; H01L21/306 ; H01L21/311 ; H01L21/324 ; H01L21/768 ; H01L27/02 ; H01L27/088 ; H01L29/06 ; H01L29/51 ; H01L29/66 ; H01L29/49
摘要:
A method of manufacturing a semiconductor structure includes receiving a substrate; patterning a first active region, a second active region and an isolation between the first active region and the second active region over the substrate; disposing an inter-level dielectric (ILD) over the substrate; forming a first gate extended over the first active region, the isolation and the second active region; and forming a second gate over the first active region and the second active region, wherein the second gate includes a first section disposed over the first active region and a second section disposed over the second active region, a portion of the ILD is disposed between the first section and the second section.
公开/授权文献
- US20170125301A1 METAL GATE STRUCTURE AND MANUFACTURING METHOD THEREOF 公开/授权日:2017-05-04
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