Invention Grant
- Patent Title: Shielded probe systems
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Application No.: US14997345Application Date: 2016-01-15
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Publication No.: US10060950B2Publication Date: 2018-08-28
- Inventor: Michael E Simmons , Bryan Conrad Bolt , Christopher Anthony Storm , Kazuki Negishi , Joseph George Frankel , Robbie Ingram-Goble
- Applicant: Cascade Microtech, Inc.
- Applicant Address: US OR Beaverton
- Assignee: FormFactor Beaverton, Inc.
- Current Assignee: FormFactor Beaverton, Inc.
- Current Assignee Address: US OR Beaverton
- Agency: Dascenzo Intellectual Property Law, P.C.
- Main IPC: G01R31/00
- IPC: G01R31/00 ; G01R1/18 ; G01R1/067 ; G01R31/28

Abstract:
Shielded probe systems are disclosed herein. The probe systems are configured to test a device under test (DUT) and include a measurement chamber that at least partially bounds an enclosed volume, an aperture defined by the measurement chamber, a probing assembly, and a shielding structure. The probing assembly includes a probe, which is oriented within the enclosed volume, a probe arm, which is operatively attached to the probe, and a manipulator, which is operatively attached to the probe arm. At least a portion of the probing assembly extends through the aperture. The shielding structure extends between the measurement chamber and the probing assembly and is configured to restrict fluid flow through the aperture and shield the enclosed volume from an ambient environment that surrounds the measurement chamber while maintaining at least a threshold separation distance from the probe arm throughout a probe arm range-of-motion thereof.
Public/Granted literature
- US20170205446A1 SHIELDED PROBE SYSTEMS Public/Granted day:2017-07-20
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