- 专利标题： Segmented guard-ring and chip edge seals
-
申请号： US15443276申请日： 2017-02-27
-
公开(公告)号： US10062748B1公开(公告)日： 2018-08-28
- 发明人: Anthony K. Stamper , Vincent J. McGahay , Zhong-Xiang He
- 申请人： GLOBALFOUNDRIES INC.
- 申请人地址： KY Grand Cayman
- 专利权人： GLOBALFOUNDRIES INC.
- 当前专利权人： GLOBALFOUNDRIES INC.
- 当前专利权人地址： KY Grand Cayman
- 代理机构： Roberts Mlotkowski Safran Cole & Calderon, P.C.
- 代理商 Anthony Canale; Andrew M. Calderon
- 主分类号： H01L23/48
- IPC分类号： H01L23/48 ; H01L29/06 ; H01L23/31 ; H01L23/528
摘要：
The present disclosure relates to semiconductor structures and, more particularly, to segmented guard-ring and chip edge seals and methods of manufacture. The structure includes: a guard ring structure formed in a low-k dielectric material; and an edge seal structure formed through the low-k dielectric material to at least a substrate underneath the low-k dielectric material.
公开/授权文献
- US20180248001A1 SEGMENTED GUARD-RING AND CHIP EDGE SEALS 公开/授权日：2018-08-30
信息查询
IPC分类:
