Invention Grant
- Patent Title: Segmented guard-ring and chip edge seals
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Application No.: US15443276Application Date: 2017-02-27
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Publication No.: US10062748B1Publication Date: 2018-08-28
- Inventor: Anthony K. Stamper , Vincent J. McGahay , Zhong-Xiang He
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- Agent Anthony Canale; Andrew M. Calderon
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L29/06 ; H01L23/31 ; H01L23/528

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to segmented guard-ring and chip edge seals and methods of manufacture. The structure includes: a guard ring structure formed in a low-k dielectric material; and an edge seal structure formed through the low-k dielectric material to at least a substrate underneath the low-k dielectric material.
Public/Granted literature
- US20180248001A1 SEGMENTED GUARD-RING AND CHIP EDGE SEALS Public/Granted day:2018-08-30
Information query
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