Invention Grant
- Patent Title: Vertical superconducting capacitors for transmon qubits
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Application No.: US15795763Application Date: 2017-10-27
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Publication No.: US10068184B1Publication Date: 2018-09-04
- Inventor: Jared Barney Hertzberg , Werner A. Rausch , Sami Rosenblatt , Rasit O. Topaloglu
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Garg Law Firm, PLLC
- Agent Rakesh Garg; David M. Quinn
- Main IPC: G06N99/00
- IPC: G06N99/00 ; H01L27/18 ; H01L39/22 ; H01L39/24 ; H01G4/008 ; H01L39/02

Abstract:
A vertical q-capacitor includes a trench in a substrate through a layer of superconducting material. A superconductor is deposited in the trench forming a first film on a first surface, a second film on a second surface, and a third film of the superconductor on a third surface of the trench. The first and second surfaces are substantially parallel, and the third surface in the trench separates the first and second surfaces. A dielectric is exposed below the third film by etching. A first coupling is formed between the first film and a first contact, and a second coupling is formed between the second film and a second contact in a superconducting quantum logic circuit. The first and second couplings cause the first and second films to operate as the vertical q-capacitor that maintains integrity of data in the superconducting quantum logic circuit within a threshold level.
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