Invention Grant
- Patent Title: Crack trapping in semiconductor device structures
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Application No.: US15662334Application Date: 2017-07-28
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Publication No.: US10068859B1Publication Date: 2018-09-04
- Inventor: Nicholas A. Polomoff , Mohamed Rabie , Victoria L. Calero Diaz Del Castillo , Danielle Degraw , Michael Hecker
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Scully Scott Murphy and Presser
- Agent Frank Digiglio
- Main IPC: H01L23/58
- IPC: H01L23/58 ; H01L23/00 ; H01L23/544

Abstract:
A structure for arresting the propagation of cracks during the dicing of a semiconductor wafer into individual chips includes a monolithic metallic plate that traverses multiple dielectric layers peripheral to an active region of a chip. One or more metallic plates may be formed using lithography and electroplating techniques between the active device region and a peripheral kerf region, where each metallic plate includes a concave feature that faces the kerf region of the wafer.
Information query
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