- 专利标题: Semiconductor memory device and manufacturing method thereof
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申请号: US15479294申请日: 2017-04-05
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公开(公告)号: US10074656B1公开(公告)日: 2018-09-11
- 发明人: Ying-Chiao Wang , Li-Wei Feng , Chien-Ting Ho , Wen-Chieh Lu , Li-Wei Liu
- 申请人: UNITED MICROELECTRONICS CORP. , Fujian Jinhua Integrated Circuit Co., Ltd.
- 申请人地址: TW Hsin-Chu CN Quanzhou, Fujian province
- 专利权人: UNITED MICROELECTRONICS CORP.,Fujian Jinhua Integrated Circuit Co., Ltd.
- 当前专利权人: UNITED MICROELECTRONICS CORP.,Fujian Jinhua Integrated Circuit Co., Ltd.
- 当前专利权人地址: TW Hsin-Chu CN Quanzhou, Fujian province
- 代理商 Winston Hsu
- 优先权: CN201710137051 20170309
- 主分类号: H01L27/108
- IPC分类号: H01L27/108
摘要:
A manufacturing method of a semiconductor memory device includes following steps. Bit line structures and storage node contacts are formed on a semiconductor substrate. A first sidewall spacer is formed on sidewalls of each bit line structure. A conductive layer covering the bit line structures, the first sidewall spacer, and the storage node contacts is formed. A first patterning process is preformed to the conductive layer for forming stripe contact structures. Each stripe contact structure is elongated in the first direction and corresponding to the storage node contacts. The first sidewall spacer at a first side of each bit line structure is exposed by the first patterning process. The first sidewall spacer at a second side of each bit line structure is covered by the stripe contact structures. The first sidewall spacer exposed by the first patterning process is removed for forming first air spacers.
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