Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US15645261Application Date: 2017-07-10
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Publication No.: US10079237B2Publication Date: 2018-09-18
- Inventor: Ji-hoon Kim , Won-chul Lee
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Yeongtong-gu, Suwon-si, Gyeonggi-do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Yeongtong-gu, Suwon-si, Gyeonggi-do
- Agency: Muir Patent Law, PLLC
- Priority: KR10-2016-0088047 20160712
- Main IPC: H01L49/02
- IPC: H01L49/02 ; H01L27/108 ; H01L23/00

Abstract:
A semiconductor memory device may include: a substrate having a cell area defined thereon, the cell area including a cell block area and an edge area; a plurality of bottom electrodes, on the substrate, which are in parallel with a top surface of the substrate and a first direction in parallel with a top surface of the substrate, and are arranged along a second direction intersecting the first direction; and a support structure pattern, in a flat plate shape, which connects the bottom electrodes to each other, supports the bottom electrodes onto the substrate, and includes a plurality of open areas, wherein a first profile, which is a horizontal cross-sectional profile in the edge area of the support structure pattern, has a wave shape.
Public/Granted literature
- US20180019243A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2018-01-18
Information query
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