Invention Grant
- Patent Title: Field-effect transistors with a buried body contact
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Application No.: US15355231Application Date: 2016-11-18
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Publication No.: US10079248B2Publication Date: 2018-09-18
- Inventor: Steven M. Shank , Mark D. Jaffe , John J. Pekarik
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Thompson Hine LLP
- Agent Anthony Canale
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L21/02 ; H01L27/12 ; H01L29/06 ; H01L23/528 ; H01L21/84 ; H01L21/8234 ; H01L21/762 ; H01L21/768 ; H01L21/265 ; H01L29/66

Abstract:
Device structures for a field-effect transistor with a body contact and methods of forming such device structures. An opening is formed that extends through a device layer of a silicon-on-insulator (SOI) substrate and into a buried oxide layer of the silicon-on-insulator substrate. The buried oxide layer is laterally etched at the location of the opening to define a cavity in the buried oxide layer. The cavity is located partially beneath a section of the device layer, and the cavity is filled with a semiconductor material to form a body contact. A well is formed in the section of the device layer, and the body contact is coupled with a portion of the well.
Public/Granted literature
- US20180145088A1 FIELD-EFFECT TRANSISTORS WITH A BURIED BODY CONTACT Public/Granted day:2018-05-24
Information query
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