Invention Grant
- Patent Title: Multicolumn charged particle beam exposure apparatus
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Application No.: US15461829Application Date: 2017-03-17
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Publication No.: US10083813B2Publication Date: 2018-09-25
- Inventor: Masaki Kurokawa , Takamasa Sato , Shinichi Kojima , Akio Yamada
- Applicant: INTEL CORPORATION
- Applicant Address: US CA Santa Clara
- Assignee: INTEL CORPORATION
- Current Assignee: INTEL CORPORATION
- Current Assignee Address: US CA Santa Clara
- Priority: JP2016-093801 20160509
- Main IPC: H01J3/14
- IPC: H01J3/14 ; H01J37/147 ; H01J37/317 ; H01J37/24

Abstract:
A multicolumn charged particle beam exposure apparatus includes a plurality of column cells which generate charged particle beams, and the column cell includes a yoke which is made of a magnetic material and generates a magnetic field of a predetermined intensity distribution around an optical axis of the column, and a coil which is wound around the yoke. The coil includes a plurality of divided windings, which are driven by different power sources.
Public/Granted literature
- US20170323760A1 MULTICOLUMN CHARGED PARTICLE BEAM EXPOSURE APPARATUS Public/Granted day:2017-11-09
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