Invention Grant
- Patent Title: Semiconductor device, method for manufacturing same, and semiconductor module
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Application No.: US15539447Application Date: 2014-12-26
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Publication No.: US10083948B2Publication Date: 2018-09-25
- Inventor: Kan Yasui , Kazuhiro Suzuki , Takafumi Taniguchi
- Applicant: Hitachi, Ltd.
- Applicant Address: JP Tokyo
- Assignee: Hitachi, Ltd.
- Current Assignee: Hitachi, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Crowell & Moring LLP
- International Application: PCT/JP2014/084456 WO 20141226
- International Announcement: WO2016/103434 WO 20160630
- Main IPC: H01L23/28
- IPC: H01L23/28 ; H01L25/18 ; H01L25/07 ; H01L29/78 ; H01L29/872 ; H01L23/00

Abstract:
In order to form, in a wide band gap semiconductor device, a high field resistant sealing material having a large end portion film thickness, said high field resistant sealing material corresponding to a reduced termination region having a high field intensity, and to improve accuracy and shorten time of manufacturing steps, this semiconductor device is configured as follows. At least a part of a cross-section of a high field resistant sealing material formed close to a termination region at the periphery of a semiconductor chip has a perpendicular shape at a chip outer peripheral end portion, said shape having, on the chip inner end side, a film thickness that is reduced toward the inner side. In a semiconductor device manufacturing method for providing such semiconductor device, the high field resistant sealing material is formed in a semiconductor wafer state, then, heat treatment is performed, and after dicing is performed, a chip is mounted.
Public/Granted literature
- US20170352648A1 Semiconductor Device, Method for Manufacturing Same, and Semiconductor Module Public/Granted day:2017-12-07
Information query
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