Invention Grant
- Patent Title: Deep trench metal-insulator-metal capacitors
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Application No.: US15292488Application Date: 2016-10-13
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Publication No.: US10083958B2Publication Date: 2018-09-25
- Inventor: Sukeshwar Kannan , Somnath Ghosh , Daniel Smith , Luke England
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Thompson Hine LLP
- Agent Yuanmin Cai
- Main IPC: H01L27/06
- IPC: H01L27/06 ; H01L23/66 ; H01L49/02 ; H01L23/522

Abstract:
Device structures for a metal-insulator-metal (MIM) capacitor, as well as methods of fabricating a device structure for a MIM capacitor. An active device level is formed on a substrate, a local interconnect level is formed on the active device level, and a metal-insulator-metal capacitor is formed in a via opening with a sidewall extending through the local interconnect level and the active device level to a given depth in the substrate. The metal-insulator-metal capacitor includes a first plate on the sidewall, a second plate, and an interplate dielectric between the first plate and the second plate.
Public/Granted literature
- US20180108651A1 DEEP TRENCH METAL-INSULATOR-METAL CAPACITORS Public/Granted day:2018-04-19
Information query
IPC分类: