Microvalve having contamination resistant features
Abstract:
A microvalve includes a first plate having a surface, a recessed area provided within the surface, a fluid port provided within the recessed area, and a sealing structure extending about the fluid port, the sealing structure having at least one divot formed therein. A second plate has a surface adjacent the surface of the first plate and including a displaceable member that is movable between a closed position, wherein the displaceable member cooperates with the sealing structure to prevent fluid communication through the fluid port, and an open position, wherein the displaceable member does not cooperate with at least a portion of the sealing structure to prevent fluid communication through the fluid port.
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