Invention Grant
- Patent Title: Chromatic confocal sensor and measurement method
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Application No.: US15417751Application Date: 2017-01-27
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Publication No.: US10094656B2Publication Date: 2018-10-09
- Inventor: Norihiko Masuda , Koji Kubo
- Applicant: MITUTOYO CORPORATION
- Applicant Address: JP Kanagawa
- Assignee: MITUTOYO CORPORATION
- Current Assignee: MITUTOYO CORPORATION
- Current Assignee Address: JP Kanagawa
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2016-020524 20160205
- Main IPC: G01B11/14
- IPC: G01B11/14 ; G01B11/04 ; G01B11/00

Abstract:
Provided is a chromatic confocal sensor including: a first light source that emits measurement light including a plurality of light beams having different wavelengths; a second light source that emits a visible light beam having a predetermined wavelength; an optical head that causes incident light to be converged at a focal position corresponding to a wavelength of the incident light and outputs reflection light reflected by an object to be measured at the focal position; a position calculation section that calculates a position of the object to be measured on the basis of the reflection light output by the optical head; and a switching section that selectively switches between a first operation in which only the measurement light enters the optical head and a second operation in which at least the visible light beam enters the optical head.
Public/Granted literature
- US20170227352A1 CHROMATIC CONFOCAL SENSOR AND MEASUREMENT METHOD Public/Granted day:2017-08-10
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