Invention Grant
- Patent Title: Thermal conditioning method
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Application No.: US15528187Application Date: 2015-11-24
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Publication No.: US10095128B2Publication Date: 2018-10-09
- Inventor: Theodorus Petrus Maria Cadee , Benjamin Joseph De Smet , Sjoerd Nicolaas Lambertus Donders , Adrianus Marinus Verdonck
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman, LLP
- Priority: EP14199555 20141222
- International Application: PCT/EP2015/077426 WO 20151124
- International Announcement: WO2016/102131 WO 20160630
- Main IPC: G03F7/20
- IPC: G03F7/20 ; F25B39/02 ; G02B7/02 ; G02B7/18

Abstract:
A method of thermally conditioning a physical object, includes guiding a two-phase cooling medium through a cooling duct of the physical object, wherein the guiding includes: guiding the two-phase cooling medium in a liquid phase via a pre-heating duct of the physical object from a supply side of the physical object at least partly towards a discharging side of the physical object, the two-phase cooling medium being pre-heated in the pre-heating duct; guiding the two-phase cooling medium from the pre-heating duct to a phase transitioning duct of the physical object, the two-phase cooling medium at least partly transitioning from the liquid phase towards a gas phase in the phase transitioning duct; guiding the two-phase cooling medium from the phase transitioning duct to a discharging duct of the physical object; and discharging at the discharging side the two-phase cooling medium from the discharging duct.
Public/Granted literature
- US20180024446A1 THERMAL CONDITIONING METHOD Public/Granted day:2018-01-25
Information query
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