Invention Grant
- Patent Title: Microelectronic test device including a probe card having an interposer
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Application No.: US14683742Application Date: 2015-04-10
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Publication No.: US10101367B2Publication Date: 2018-10-16
- Inventor: Jin Pan , Jin Yang , Erkan Acar
- Applicant: INTEL CORPORATION
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Green, Howard, & Mughal LLP
- Main IPC: G01R3/00
- IPC: G01R3/00 ; G01R1/073 ; G01R31/28

Abstract:
A microelectronic test device comprising an organic substrate, a probe holder, and an interposer disposed between the organic substrate and the probe holder, wherein the interposer has a coefficient of thermal expansion that is less than a coefficient of thermal expansion of the organic substrate. The interposer may effectively decouple the organic substrate from probes in the probe holder, which may substantially reduce or eliminate probe misalignment due to the coefficient of thermal expansion mismatch between the organic substrate and other components of the microelectronic test device and to provide require stiffness to the organic substrate.
Public/Granted literature
- US20160299174A1 MICROELECTRONIC TEST DEVICE INCLUDING A PROBE CARD HAVING AN INTERPOSER Public/Granted day:2016-10-13
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