- 专利标题: Semiconductor package structure and fabrication method thereof
-
申请号: US15873784申请日: 2018-01-17
-
公开(公告)号: US10103110B2公开(公告)日: 2018-10-16
- 发明人: Tien-Szu Chen , Sheng-Ming Wang , Kuang-Hsiung Chen , Yu-Ying Lee
- 申请人: Advanced Semiconductor Engineering, Inc.
- 申请人地址: TW Kaohsiung
- 专利权人: ADVANCED SEMICONDUCTOR ENGINEERING, INC.
- 当前专利权人: ADVANCED SEMICONDUCTOR ENGINEERING, INC.
- 当前专利权人地址: TW Kaohsiung
- 代理机构: Foley & Lardner LLP
- 代理商 Cliff Z. Liu
- 优先权: CN201310161037 20130503
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L23/00 ; H01L23/31 ; H01L23/498 ; H01L21/56
摘要:
A semiconductor package structure and a fabrication method thereof are provided. The fabrication method comprises: providing a substrate strip, the substrate strip comprising a plurality of substrate units which comprise a substrate unit; disposing a plurality of chips on the plurality of substrate units; disposing a packaging encapsulant on the substrate strip to encapsulate the chips; forming a warp-resistant layer on a top surface of the packaging encapsulant; and dividing the substrate strip to separate the plurality of substrate units to further fabricate a plurality of semiconductor package structures which comprise a semiconductor package structure comprising the substrate unit, wherein the warp-resistant layer is formed of a selected material with a selected thickness to make a variation of warpage of the semiconductor package structure at a temperature between 25° C. and 260° C. to be smaller than 560 μm.
公开/授权文献
信息查询
IPC分类: