Invention Grant
- Patent Title: Plasma processing method
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Application No.: US15642469Application Date: 2017-07-06
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Publication No.: US10109461B2Publication Date: 2018-10-23
- Inventor: Norikazu Yamada , Toshifumi Tachikawa , Koichi Nagami , Satoru Hamaishi , Koji Itadani
- Applicant: Tokyo Electron Limited , Daihen Corporation
- Applicant Address: JP Tokyo JP Osaki-Shi, Osaka
- Assignee: TOKYO ELECTRON LIMITED,DAIHEN CORPORATION
- Current Assignee: TOKYO ELECTRON LIMITED,DAIHEN CORPORATION
- Current Assignee Address: JP Tokyo JP Osaki-Shi, Osaka
- Agency: Pearne & Gordon LLP
- Priority: JP2011-274391 20111215
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01J37/32 ; H05H1/46

Abstract:
A plasma processing method for performing a plasma process on a substrate in a plasma processing apparatus is provided. The plasma processing method comprises: a sampling-average-value calculating process of sampling voltage detection signals and electric current detection signals and calculating an average value of these signals during a first monitoring time; a moving-average-value calculating process of calculating a moving average value of the voltage detection signals and the electric current detection signals; a load impedance-measurement-value calculating process of calculating a measurement value of a load impedance with respect to a first high frequency power supply; and a reactance control process of controlling a reactance of a variable reactance element such that the measurement value of the load impedance is equal or approximate to a preset matching point corresponding to impedance on the side of the first high frequency power supply.
Public/Granted literature
- US20170372873A1 PLASMA PROCESSING METHOD Public/Granted day:2017-12-28
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