Invention Grant
- Patent Title: Visual feedback for process control in RTP chambers
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Application No.: US15675825Application Date: 2017-08-14
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Publication No.: US10109514B2Publication Date: 2018-10-23
- Inventor: Kim Vellore , Dinesh Kanawade , Stephen Moffatt , Aaron Miller , Leonid M. Tertitski , Norman L. Tam , Michael Liu , Colin Fox
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: H05B3/68
- IPC: H05B3/68 ; H01L21/67

Abstract:
Embodiments of the present disclosure generally relate to methods and apparatus for visual lamp failure detection in a processing chamber, such as an RTP chamber. Visual feedback is facilitated through the use of a wide-angle lens positioned to view lamps within the process chamber. The wide-angle lens is positioned within a probe and secured using a spring in order to withstand high temperature processing. A camera coupled to the lens is adapted to capture an image of the lamps within the process chamber. The captured image of the lamps is then compared to a reference image to determine if the lamps are functioning as desired.
Public/Granted literature
- US20170345693A1 VISUAL FEEDBACK FOR PROCESS CONTROL IN RTP CHAMBERS Public/Granted day:2017-11-30
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