- 专利标题: Feedback gain adjusting method and device of tracking-type laser interferometer and tracking-type laser interferometer
-
申请号: US15664051申请日: 2017-07-31
-
公开(公告)号: US10120059B2公开(公告)日: 2018-11-06
- 发明人: Shinichi Hara
- 申请人: MITUTOYO CORPORATION
- 申请人地址: JP Kanagawa
- 专利权人: MITUTOYO CORPORATION
- 当前专利权人: MITUTOYO CORPORATION
- 当前专利权人地址: JP Kanagawa
- 代理机构: Greenblum & Bernstein, P.L.C.
- 优先权: JP2016-157922 20160810
- 主分类号: G01S17/66
- IPC分类号: G01S17/66 ; G01S3/786
摘要:
A laser interferometer that includes a laser interferometer, an position sensitive detector detecting an offset of an optical axis of the laser interferometer, a biaxial rotator turning the laser interferometer toward an arbitrary direction, an angle sensor detecting a rotation angle of the biaxial rotator, a retro reflector reflecting reflected light in a direction parallel to incident light, and a controller performing feedback control of the biaxial rotator so as to track the retro reflector based on signals from the position sensitive detector and the angle sensor. The tracking-type laser interferometer starts tracking control when return light from the retro reflector is returned to a detection range of the position sensitive detector, and changes gain for the feedback control in accordance with a behavior for a position of the return light on the position sensitive detector due to the tracking control.