- 专利标题: Measurement apparatus that obtains information of a shape of a surface using a corrected image and measurement method
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申请号: US15055900申请日: 2016-02-29
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公开(公告)号: US10121246B2公开(公告)日: 2018-11-06
- 发明人: Tsuyoshi Kitamura
- 申请人: CANON KABUSHIKI KAISHA
- 申请人地址: JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 代理机构: Rossi, Kimms & McDowell LLP
- 优先权: JP2015-042977 20150304
- 主分类号: H04N9/04
- IPC分类号: H04N9/04 ; G06T7/00 ; G01B11/25 ; G06T5/50 ; G06T7/586 ; H04N5/225
摘要:
A measurement apparatus includes: a first illumination unit configured to illuminate the surface with first light having a first wavelength having a light intensity distribution in a pattern shape; a second illumination unit configured to illuminate, with second light having a second wavelength, a region wider than an illumination region illuminated with the first light; an image sensing unit configured to sense an image of the surface; and a processor. The processor is configured to obtain a first image of the first wavelength and a second image of the second wavelength of the surface unit while illuminating the surface by using the first and second illumination units, correct the first image based on the second image, and obtain information of a shape of the surface by using the corrected first image.
公开/授权文献
- US20160260217A1 MEASUREMENT APPARATUS AND MEASUREMENT METHOD 公开/授权日:2016-09-08
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