- 专利标题: Semiconductor device and method of manufacturing the same
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申请号: US14469920申请日: 2014-08-27
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公开(公告)号: US10121705B2公开(公告)日: 2018-11-06
- 发明人: Hirofumi Shinohara , Hidekazu Oda , Toshiaki Iwamatsu
- 申请人: Renesas Electronics Corporation
- 申请人地址: JP Tokyo
- 专利权人: RENESAS ELECTRONICS CORPORATION
- 当前专利权人: RENESAS ELECTRONICS CORPORATION
- 当前专利权人地址: JP Tokyo
- 代理机构: McGinn IP Law Group, PLLC
- 优先权: JP2013-240906 20131121
- 主分类号: H01L21/8234
- IPC分类号: H01L21/8234 ; H01L21/8238 ; H01L27/092 ; H01L21/84 ; H01L27/088 ; H01L27/11 ; H01L27/12
摘要:
To suppress performance degradation of a semiconductor device, when the width of a first active region having a first field effect transistor formed therein is smaller than the width of a second active region having a second field effect transistor formed therein, the height of a surface of a first raised source layer of the first field effect transistor is made larger than the height of a surface of a second raised source layer of the second field effect transistor. Moreover, the height of a first surface of a raised drain layer of the first field effect transistor is made larger than a surface of a second raised drain layer of the second field effect transistor.
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