- 专利标题: Method of measuring a topographic profile and/or a topographic image
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申请号: US15001049申请日: 2016-01-19
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公开(公告)号: US10132830B2公开(公告)日: 2018-11-20
- 发明人: Bertrand Bellaton , Richard Consiglio , Jacques Woirgard
- 申请人: Anton Paar TriTec SA
- 申请人地址: CH Peseux
- 专利权人: Anton Paar TriTec SA
- 当前专利权人: Anton Paar TriTec SA
- 当前专利权人地址: CH Peseux
- 代理机构: Christensen O'Connor Johnson Kindness PLLC
- 优先权: CH1679/15 20151118
- 主分类号: G01Q20/00
- IPC分类号: G01Q20/00 ; G01Q30/02 ; G01N3/42 ; G01Q60/38
摘要:
Measuring a topographic profile and/or a topographic image of a surface of a sample includes positioning an indenter out of contact with a sample and in a constant position with respect to a headstock; positioning a topographic tip to detect a surface of the sample and positioning a reference structure at a predetermined distance from said surface; measuring the relative position of the indenter with respect to the reference structure by a relative position sensor; translating said sample perpendicular to said longitudinal axis while maintaining the reference structure at said predetermined distance from the surface of the sample by the feedback control system and the second actuator while measuring the relative position of the indenter with respect to the reference structure by the relative position sensor; and generating a topographic profile and/or a topographic image based on measurements of the relative position.
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