- 专利标题: Coating liquid for resist pattern coating
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申请号: US15512802申请日: 2015-09-18
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公开(公告)号: US10133178B2公开(公告)日: 2018-11-20
- 发明人: Tokio Nishita , Shuhei Shigaki , Noriaki Fujitani , Takafumi Endo , Rikimaru Sakamoto
- 申请人: NISSAN CHEMICAL INDUSTRIES, LTD.
- 申请人地址: JP Tokyo
- 专利权人: NISSAN CHEMICAL INDUSTRIES, LTD.
- 当前专利权人: NISSAN CHEMICAL INDUSTRIES, LTD.
- 当前专利权人地址: JP Tokyo
- 代理机构: Oliff PLC
- 优先权: JP2014-190849 20140919; JP2014-201382 20140930
- 国际申请: PCT/JP2015/076715 WO 20150918
- 国际公布: WO2016/043317 WO 20160324
- 主分类号: G03F7/40
- IPC分类号: G03F7/40 ; C08F212/12 ; C09D5/00 ; C09D7/00 ; C09D183/04 ; C09D201/00 ; C09D7/20 ; C08G8/04 ; C08G77/14 ; C09D125/16 ; G03F7/039 ; G03F7/09 ; G03F7/11 ; G03F7/16 ; G03F7/20 ; G03F7/32 ; G03F7/38 ; H01L21/02 ; H01L21/027 ; H01L21/311 ; H01L21/033
摘要:
There is provided a new coating liquid for resist pattern coating. A coating liquid for resist pattern coating comprising a component A that is a polymer including at least one hydroxy group or carboxy group; a component B that is a sulfonic acid of A-SO3H (where A is a linear or branched alkyl group or fluorinated alkyl group having a carbon atom number of 1 to 16, an aromatic group having at least one of the alkyl group or the fluorinated alkyl group as a substituent, or a C4-16 alicyclic group optionally having a substituent); and a component C that is an organic solvent capable of dissolving the polymer and including ether or ketone compound of R1—O—R2 and/or R1—C(═O)—R2 (where R1 is a linear, branched, or cyclic alkyl group or fluorinated alkyl group having a carbon atom number of 3 to 16; and R2 is a linear, branched, or cyclic alkyl group or fluorinated alkyl group having a carbon atom number of 1 to 16), a method of forming a resist pattern using the coating liquid, and a method for forming a reverse pattern using the coating liquid.
公开/授权文献
- US20170293227A1 COATING LIQUID FOR RESIST PATTERN COATING 公开/授权日:2017-10-12
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