- 专利标题： Polycrystalline ceramic substrate and method of manufacture
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申请号： US15621235申请日： 2017-06-13
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公开(公告)号： US10134589B2公开(公告)日： 2018-11-20
- 发明人: Vladimir Odnoblyudov , Cem Basceri , Shari Farrens
- 申请人： Qromis, Inc.
- 申请人地址： US CA Santa Clara
- 专利权人： Qromis, Inc.
- 当前专利权人： Qromis, Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Kilpatrick Townsend & Stockton LLP
- 主分类号： H01L21/02
- IPC分类号： H01L21/02 ; C23C16/56 ; H01L21/84 ; H01L27/12 ; H01L33/02 ; C23C16/40 ; C23C16/50 ; C30B29/06 ; C30B29/40
摘要：
A method of fabricating a ceramic substrate structure includes providing a ceramic substrate, encapsulating the ceramic substrate in a barrier layer, and forming a bonding layer coupled to the barrier layer. The method further includes removing a portion of the bonding layer to expose at least a portion of the barrier layer and define fill regions, and depositing a second bonding layer on the at least a portion of the exposed barrier layer and the fill regions.
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