Invention Grant
- Patent Title: Apparatus of plural charged-particle beams
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Application No.: US15365145Application Date: 2016-11-30
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Publication No.: US10141160B2Publication Date: 2018-11-27
- Inventor: Weiming Ren , Xuedong Liu , Xuerang Hu , Zhongwei Chen
- Applicant: Hermes Microvision Inc.
- Applicant Address: TW Hsinchu
- Assignee: HERMES MICROVISION, INC.
- Current Assignee: HERMES MICROVISION, INC.
- Current Assignee Address: TW Hsinchu
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- Main IPC: H01J37/28
- IPC: H01J37/28 ; H01J37/14 ; H01J37/153 ; H01J37/20 ; H01J37/244 ; H01J37/141 ; H01J37/29

Abstract:
A secondary projection imaging system in a multi-beam apparatus is proposed, which makes the secondary electron detection with high collection efficiency and low cross-talk. The system employs one zoom lens, one projection lens and one anti-scanning deflection unit. The zoom lens and the projection lens respectively perform the zoom function and the anti-rotating function to remain the total imaging magnification and the total image rotation with respect to the landing energies and/or the currents of the plural primary beamlets. The anti-scanning deflection unit performs the anti-scanning function to eliminate the dynamic image displacement due to the deflection scanning of the plural primary beamlets.
Public/Granted literature
- US20170154756A1 Apparatus of Plural Charged-Particle Beams Public/Granted day:2017-06-01
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