- 专利标题: Superconducting thermal detector (bolometer) of terahertz (sub-millimeter wave) radiation
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申请号: US14773359申请日: 2014-03-04
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公开(公告)号: US10145743B2公开(公告)日: 2018-12-04
- 发明人: Andrey Timofeev , Juha Hassel , Arttu Luukanen , Panu Helistö , Leif Grönberg
- 申请人: Teknologian tutkimuskeskus VTT Oy
- 申请人地址: FI Espoo
- 专利权人: Teknologian tutkimuskeskus VTT Oy
- 当前专利权人: Teknologian tutkimuskeskus VTT Oy
- 当前专利权人地址: FI Espoo
- 代理机构: Seppo Laine Oy
- 优先权: FI20135212 20130305
- 国际申请: PCT/FI2014/050158 WO 20140304
- 国际公布: WO2014/135749 WO 20140912
- 主分类号: G01J5/20
- IPC分类号: G01J5/20 ; G01J5/02 ; H01L37/00 ; G01J5/10
摘要:
A superconducting thermal detector (bolometer) of THz (sub-millimeter) wave radiation based on sensing the change in the amplitude or phase of a resonator circuit, consisting of a capacitor (Csh) and a superconducting temperature dependent inductor where the said inductor is thermally isolated from the heat bath (chip substrate) by micro-suspensions. The bolometer design includes a thin film inductor located on the membrane, a single or/and multi-layered thin film capacitor, and a thin film absorber of incoming radiation. The bolometer design can also include a lithographic antenna with antenna termination and/or a back reflector beneath the membrane for optimal wavelength detection by the resonance circuit. The superconducting thermal detector (bolometer) and arrays of these detectors operate in a temperature range from 1 Kelvin to 10 Kelvin.