Invention Grant
- Patent Title: Superconducting thermal detector (bolometer) of terahertz (sub-millimeter wave) radiation
-
Application No.: US14773359Application Date: 2014-03-04
-
Publication No.: US10145743B2Publication Date: 2018-12-04
- Inventor: Andrey Timofeev , Juha Hassel , Arttu Luukanen , Panu Helistö , Leif Grönberg
- Applicant: Teknologian tutkimuskeskus VTT Oy
- Applicant Address: FI Espoo
- Assignee: Teknologian tutkimuskeskus VTT Oy
- Current Assignee: Teknologian tutkimuskeskus VTT Oy
- Current Assignee Address: FI Espoo
- Agency: Seppo Laine Oy
- Priority: FI20135212 20130305
- International Application: PCT/FI2014/050158 WO 20140304
- International Announcement: WO2014/135749 WO 20140912
- Main IPC: G01J5/20
- IPC: G01J5/20 ; G01J5/02 ; H01L37/00 ; G01J5/10

Abstract:
A superconducting thermal detector (bolometer) of THz (sub-millimeter) wave radiation based on sensing the change in the amplitude or phase of a resonator circuit, consisting of a capacitor (Csh) and a superconducting temperature dependent inductor where the said inductor is thermally isolated from the heat bath (chip substrate) by micro-suspensions. The bolometer design includes a thin film inductor located on the membrane, a single or/and multi-layered thin film capacitor, and a thin film absorber of incoming radiation. The bolometer design can also include a lithographic antenna with antenna termination and/or a back reflector beneath the membrane for optimal wavelength detection by the resonance circuit. The superconducting thermal detector (bolometer) and arrays of these detectors operate in a temperature range from 1 Kelvin to 10 Kelvin.
Public/Granted literature
- US20160018267A1 Superconducting thermal detector (bolometer) of terahertz (sub-millimeter wave) radiation Public/Granted day:2016-01-21
Information query