Invention Grant
- Patent Title: Shower head for electronic device having dispersion pins fabrication and shower head assembly
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Application No.: US14392174Application Date: 2014-06-25
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Publication No.: US10161040B2Publication Date: 2018-12-25
- Inventor: Chul Soo Byun , Il Yong Chung
- Applicant: Korea Institute of Industrial Technology
- Applicant Address: KR Cheonan-Si, Chungcheongnam-Do
- Assignee: Korea Institute of Industrial Technology
- Current Assignee: Korea Institute of Industrial Technology
- Current Assignee Address: KR Cheonan-Si, Chungcheongnam-Do
- Agency: Reinhart Boerner Van Deuren P.C.
- Priority: KR10-2013-0073464 20130626; KR10-2014-0077279 20140624
- International Application: PCT/KR2014/005644 WO 20140625
- International Announcement: WO2014/209017 WO 20141231
- Main IPC: B05B1/18
- IPC: B05B1/18 ; C23C16/455 ; H01J37/32
Abstract:
A showerhead is provided. The showerhead includes a body and a plurality of first dispersion pins. The body has one side having a plurality of injection holes penetrated therethrough and the other side facing the one side. The plurality of first dispersion pins protruding from the plurality of spray holes of the one side to the other side such that end portions thereof support the other side. The first dispersion holes have first gas inlet holes on one side and first passages connected to the first gas inlet holes therein. Gas introduced between the one side and the other side is immediately discharged to the outside of the body through the plurality of spray holes by passing the first gas inlet holes and the first passages.
Public/Granted literature
- US20160184838A1 Shower Head for Electronic Device having Dispersion Pins Fabrication and Shower Head Assembly Public/Granted day:2016-06-30
Information query
IPC分类:
