Invention Grant
- Patent Title: Three-dimensional fine movement device
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Application No.: US14794968Application Date: 2015-07-09
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Publication No.: US10161958B2Publication Date: 2018-12-25
- Inventor: Masatsugu Shigeno , Kazutoshi Watanabe , Masafumi Watanabe
- Applicant: Hitachi High-Tech Science Corporation
- Applicant Address: JP Minato-ku, Tokyo
- Assignee: Hitachi High-Tech Science Corporation
- Current Assignee: Hitachi High-Tech Science Corporation
- Current Assignee Address: JP Minato-ku, Tokyo
- Agency: Banner & Witcoff, Ltd.
- Priority: JP2014-141057 20140709
- Main IPC: G01Q10/04
- IPC: G01Q10/04 ; G01Q70/04 ; G01Q10/02 ; G01Q20/00 ; G01Q20/02

Abstract:
A three-dimensional fine movement device includes a moving body, a fixation member to which the moving body is fixed, a three-dimensional fine movement unit, to which the fixation member is fixed, and which allows for three-dimensional fine movement of the moving body with the fixation member interposed therebetween, a base member to which the three-dimensional fine movement unit is fixed, and movement amount detecting means that is fixed to the base member to detect a movement amount of the fixation member.
Public/Granted literature
- US20160011231A1 Three-Dimensional Fine Movement Device Public/Granted day:2016-01-14
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