Invention Grant
- Patent Title: Gas distribution system, reactor including the system, and methods of using the same
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Application No.: US14218690Application Date: 2014-03-18
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Publication No.: US10167557B2Publication Date: 2019-01-01
- Inventor: Mark Hawkins , Bradley Leonard Halleck , Tom Kirschenheiter , Benjamin Hossa , Clay Pottebaum , Claudio Miskys
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Agency: Snell & Wilmer L.L.P.
- Main IPC: C23C16/455
- IPC: C23C16/455 ; C23C16/52
Abstract:
A gas distribution system, a reactor system including the gas distribution system, and method of using the gas distribution system and reactor system are disclosed. The gas distribution system can be used in gas-phase reactor systems to independently fine tune gas source locations and gas flow rates of reactants to a reaction chamber of the reactor systems.
Public/Granted literature
- US20150267299A1 GAS DISTRIBUTION SYSTEM, REACTOR INCLUDING THE SYSTEM, AND METHODS OF USING THE SAME Public/Granted day:2015-09-24
Information query
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