Invention Grant
- Patent Title: Transistor panel having a good insulation property and a manufacturing method thereof
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Application No.: US15412278Application Date: 2017-01-23
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Publication No.: US10170626B2Publication Date: 2019-01-01
- Inventor: Kwang Soo Lee , Shin Hyuk Yang , Doo Hyun Kim , Jee Hoon Kim
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin-si, Gyeonggi-Do
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin-si, Gyeonggi-Do
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2016-0053469 20160429
- Main IPC: H01L29/10
- IPC: H01L29/10 ; H01L29/12 ; H01L29/786 ; H01L27/12 ; H01L29/66 ; H01L27/32

Abstract:
A transistor panel includes a channel region including an oxide of a first metal, a source region and a drain region, each including the first metal, wherein the channel region is disposed between the source and drain regions, and wherein the channel region is connected to the source and drain regions, an insulation layer disposed on the channel region, an upper electrode disposed on the insulation layer, an interlayer insulation layer disposed on the upper electrode, the source region and the drain region, and a barrier layer including a first portion disposed between the interlayer insulation layer and each of the source and drain regions, wherein the first portion of the barrier layer contacts each of the source and drain regions. The upper electrode and the barrier layer each comprise a second metal.
Public/Granted literature
- US20170317216A1 TRANSISTOR PANEL HAVING A GOOD INSULATION PROPERTY AND A MANUFACTURING METHOD THEREOF Public/Granted day:2017-11-02
Information query
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