- 专利标题: Micromirror array and method for the manufacture thereof
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申请号: US15313208申请日: 2015-05-29
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公开(公告)号: US10175473B2公开(公告)日: 2019-01-08
- 发明人: Joerg Muchow , Rainer Straub , Johannes Baader
- 申请人: Robert Bosch GmbH
- 申请人地址: DE Stuttgart
- 专利权人: ROBERT BOSCH GMBH
- 当前专利权人: ROBERT BOSCH GMBH
- 当前专利权人地址: DE Stuttgart
- 代理机构: Norton Rose Fulbright US LLP
- 代理商 Gerard Messina
- 优先权: DE102014211546 20140617
- 国际申请: PCT/EP2015/061966 WO 20150529
- 国际公布: WO2015/193080 WO 20151223
- 主分类号: G02B26/08
- IPC分类号: G02B26/08 ; B81B3/00 ; B81C1/00
摘要:
A micromirror array is provided having a mirror membrane, including a first supporting element, including for each first supporting element, a first coupling element that is located between the mirror membrane and the particular first supporting element and is formed to mechanically couple the particular first supporting element to the mirror membrane; having at least one second supporting element that is mechanically coupled to the at least one first supporting element; and having a second coupling element for each second supporting element that is formed to be mechanically contacted. Also a method for manufacturing a micromirror array according to the present inventions described.
公开/授权文献
- US20170205621A1 MICROMIRROR ARRAY AND METHOD FOR THE MANUFACTURE THEREOF 公开/授权日:2017-07-20
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