- Patent Title: Adhesive for temporary bonding, adhesive layer, wafer work piece and method for manufacturing semiconductor device using same, rework solvent, polyimide copolymer, polyimide mixed resin, and resin composition
-
Application No.: US15502406Application Date: 2015-08-05
-
Publication No.: US10177022B2Publication Date: 2019-01-08
- Inventor: Shinji Arimoto , Takenori Fujiwara , Masao Tomikawa
- Applicant: TORAY INDUSTRIES, INC.
- Applicant Address: JP Tokyo
- Assignee: Toray Industries, Inc.
- Current Assignee: Toray Industries, Inc.
- Current Assignee Address: JP Tokyo
- Agency: RatnerPrestia
- Priority: JP2014-162145 20140808; JP2014-200265 20140930
- International Application: PCT/JP2015/072248 WO 20150805
- International Announcement: WO2016/021646 WO 20160211
- Main IPC: C09J183/14
- IPC: C09J183/14 ; H01L21/683 ; C08G73/10 ; C09J7/00 ; C09J11/06 ; C08K5/544 ; C09J179/08 ; C09J183/04 ; C11D7/50 ; C08L79/08 ; C08L83/04 ; H01L21/304 ; H01L21/02 ; B32B7/12 ; B32B43/00 ; C09J5/00 ; H01L21/768

Abstract:
The present invention provides a temporary-bonding adhesive having excellent heat resistance, whereby a semiconductor circuit formation substrate and a support substrate can be bonded by a single type of adhesive layer, the adhesive force thereof does not change over the course of steps for manufacturing a semiconductor device or the like, and the adhesive can subsequently be easily de-bonded at room temperature under mild conditions; and a method for manufacturing a semiconductor device using the temporary-bonding adhesive. The present invention includes a temporary-bonding adhesive wherein a polyimide copolymer having at least an acid dianhydride residue and a diamine residue, the diamine residue including both of (A1) a polysiloxane-based diamine residue represented by a general formula (1) in which n is a natural number from 1 to 15, and (B1) a polysiloxane-based diamine residue represented by a general formula (1) in which n is a natural number from 16 to 100, the polyimide copolymer containing 40-99.99 mol % of the (A1) residue and 0.01-60 mol % of the (B1) residue.
Public/Granted literature
Information query
IPC分类: