- Patent Title: Vertical FET with different channel orientations for NFET and PFET
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Application No.: US15436013Application Date: 2017-02-17
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Publication No.: US10177046B2Publication Date: 2019-01-08
- Inventor: Kangguo Cheng , Xin Miao , Wenyu Xu , Chen Zhang
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L21/8238
- IPC: H01L21/8238 ; H01L27/092 ; H01L29/04 ; H01L29/78

Abstract:
A technique relates to forming a semiconductor device. A first substrate is provided adjacent to a second substrate. The first substrate has a first surface orientation, and the second substrate has a second surface orientation different from the first surface orientation. An n-type field effect transistor (NFET) device is formed with the first substrate. The NFET device includes a first source, a first drain, and one or more first fins. The first source and the first drain have a vertical relationship with respect to the one or more first fins. A p-type field effect transistor (PFET) device is formed with the second substrate. The PFET device includes a second source, a second drain, and one or more second fins. The second source and the second drain have a vertical relationship with respect to the one or more second fins.
Public/Granted literature
- US20180240716A1 VERTICAL FET WITH DIFFERENT CHANNEL ORIENTATIONS FOR NFET AND PFET Public/Granted day:2018-08-23
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