Invention Grant
- Patent Title: Transistor work function adjustment by laser stimulation
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Application No.: US16017801Application Date: 2018-06-25
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Publication No.: US10177051B2Publication Date: 2019-01-08
- Inventor: Michael R. Seningen
- Applicant: Apple Inc.
- Applicant Address: US CA Cupertino
- Assignee: Apple Inc.
- Current Assignee: Apple Inc.
- Current Assignee Address: US CA Cupertino
- Agency: Meyertons, Hood, Kivlin, Kowert & Goetzel, P.C.
- Main IPC: H01L21/66
- IPC: H01L21/66 ; B23K26/351 ; B23K26/00 ; G01R31/28 ; G01R31/26 ; H01L29/66 ; H01L21/67 ; H01L21/321 ; H01L21/268 ; B23K26/354 ; B23K101/42

Abstract:
Methods and apparatuses for modifying a work function of transistors included in an integrated circuit are disclosed. A tester unit may be configured to test an integrated circuit that includes a plurality of circuit paths. The tester unit may be further configured to analyze the results from testing the integrated circuit and, based on the analysis, identify a circuit path that fails to meet a desired performance goal. A work function of a transistor included in the identified circuit path may be modified by the tester unit using an energy source external to the integrated circuit.
Public/Granted literature
- US20180308772A1 TRANSISTOR WORK FUNCTION ADJUSTMENT BY LASER STIMULATION Public/Granted day:2018-10-25
Information query
IPC分类: