- 专利标题: Bulk acoustic wave resonator comprising multiple acoustic reflectors
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申请号: US14725086申请日: 2015-05-29
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公开(公告)号: US10177736B2公开(公告)日: 2019-01-08
- 发明人: Brice Ivira , Tiberiu Jamneala , Domingo Figueredo
- 申请人: Avago Technologies General IP (Singapore) Pte. Ltd.
- 申请人地址: SG Singapore
- 专利权人: Avago Technologies International Sales Pte. Limited
- 当前专利权人: Avago Technologies International Sales Pte. Limited
- 当前专利权人地址: SG Singapore
- 主分类号: H03H9/17
- IPC分类号: H03H9/17
摘要:
A bulk acoustic wave (BAW) resonator includes: a plurality of acoustic reflectors disposed in a substrate; a lower electrode disposed over the plurality of acoustic reflectors; a piezoelectric layer disposed over the lower electrode; and a plurality of upper electrodes, disposed over the piezoelectric layer. One of the plurality of upper electrodes is formed over a respective one of the plurality of acoustic reflectors. Each of the plurality of upper electrodes, the piezoelectric layer, the lower electrode, and each of the acoustic reflectors form an individual active area.
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