- 专利标题: Three dimensional complementary metal oxide semiconductor carbon nanotube thin film transistor circuit
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申请号: US15927293申请日: 2018-03-21
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公开(公告)号: US10192930B2公开(公告)日: 2019-01-29
- 发明人: Yu-Dan Zhao , Qun-Qing Li , Xiao-Yang Xiao , Guan-Hong Li , Yuan-Hao Jin , Shou-Shan Fan
- 申请人: Tsinghua University , HON HAI PRECISION INDUSTRY CO., LTD.
- 申请人地址: CN Beijing TW New Taipei
- 专利权人: Tsinghua University,HON HAI PRECISION INDUSTRY CO., LTD.
- 当前专利权人: Tsinghua University,HON HAI PRECISION INDUSTRY CO., LTD.
- 当前专利权人地址: CN Beijing TW New Taipei
- 代理机构: ScienBiziP, P.C.
- 主分类号: H01L27/28
- IPC分类号: H01L27/28 ; H01L51/05 ; H01L51/00 ; H01L51/10
摘要:
A metal oxide semiconductor carbon nanotube thin film transistor circuit includes a p-type carbon nanotube thin film transistor and an n-type carbon nanotube thin film transistor stacked on one another. The p-type carbon nanotube thin film transistor includes a first semiconductor carbon nanotube layer, a first drain electrode, a first source electrode, a functional dielectric layer, and a first gate electrode. The n-type carbon nanotube thin film transistor includes a second semiconductor carbon nanotube layer, a second drain electrode, a second source electrode, a first insulating layer, and a second gate electrode. The first drain electrode and the second drain electrode are electrically connected with each other. The first gate electrode and the second gate electrode are electrically connected with each other.
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