- 专利标题: Low temperature polycrystalline silicon thin film transistor
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申请号: US14916187申请日: 2016-01-20
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公开(公告)号: US10192975B2公开(公告)日: 2019-01-29
- 发明人: Gaiping Lu
- 申请人: Wuhan China Star Optoelectronics Technology Co., Ltd.
- 申请人地址: CN Wuhan, Hubei
- 专利权人: Wuhan China Star Optoelectronics Technology Co., Ltd
- 当前专利权人: Wuhan China Star Optoelectronics Technology Co., Ltd
- 当前专利权人地址: CN Wuhan, Hubei
- 代理商 Andrew C. Cheng
- 优先权: CN201510964883 20151221
- 国际申请: PCT/CN2016/071397 WO 20160120
- 国际公布: WO2017/107274 WO 20170629
- 主分类号: H01L29/66
- IPC分类号: H01L29/66 ; H01L29/78 ; H01L27/12 ; H01L27/32 ; H01L29/786 ; H01L21/02 ; H01L21/306
摘要:
The disclosure relates to a low temperature polycrystalline silicon thin film transistor including: a substrate; a buffer layer formed on the substrate; a semiconductor layer formed on the buffer layer; a gate insulation layer formed on the buffer layer and the semiconductor layer; gates formed on the gate insulation layer; a dielectric layer formed on the gate insulation layer and the gates; a passivation layer formed on the dielectric layer; a first contact hole and a second contact hole formed respectively inside the passivation layer, the dielectric layer and the gate insulation layer, and sources ad drains formed respectively on the first contact hole and the second contact hole; the semiconductor layer being a low temperature poly silicon layer, and a reflective layer and/or an insulation layer disposed between the buffer layer and the semiconductor layer. The disclosure further relates to a manufacturing method for aforementioned thin film transistor.
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