- Patent Title: MEMS grid for manipulating structural parameters of MEMS devices
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Application No.: US15441887Application Date: 2017-02-24
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Publication No.: US10199262B2Publication Date: 2019-02-05
- Inventor: Roman Gutierrez , Tony Tang , Xiaolei Liu , Guiqin Wang , Matthew Ng
- Applicant: MEMS Drive, Inc.
- Applicant Address: US CA Arcadia
- Assignee: MEMS Drive, Inc.
- Current Assignee: MEMS Drive, Inc.
- Current Assignee Address: US CA Arcadia
- Agency: Holland & Knight LLP
- Agent Brian J. Colandreo; Michael T. Abramson
- Main IPC: B81B7/00
- IPC: B81B7/00 ; B81B7/02 ; B81C1/00 ; H01L23/00 ; H01L23/31 ; H01L21/768 ; H01L23/485 ; B81B3/00
Abstract:
A system and method for manipulating the structural characteristics of a MEMS device include etching a plurality of holes into the surface of a MEMS device, wherein the plurality of holes comprise one or more geometric shapes determined to provide specific structural characteristics desired in the MEMS device.
Public/Granted literature
- US20170320724A1 MEMS GRID FOR MANIPULATING STRUCTURAL PARAMETERS OF MEMS DEVICES Public/Granted day:2017-11-09
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