Invention Grant
- Patent Title: Reflector
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Application No.: US15525626Application Date: 2015-11-04
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Publication No.: US10216101B2Publication Date: 2019-02-26
- Inventor: Han-Kwang Nienhuys , Sjoerd Nicolaas Lambertus Donders , Gosse Charles De Vries , Michael Jozef Mathijs Renkens , Erik Roelof Loopstra
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Priority: EP14197602 20141212
- International Application: PCT/EP2015/075716 WO 20151104
- International Announcement: WO2016/091486 WO 20160616
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G02B5/18 ; G02B7/18

Abstract:
A reflector (2) comprising a plate (4) supported by a substrate (8), wherein the plate has a reflective surface (5) and is secured to the substrate by adhesive free bonding, and wherein a cooling channel array (10) is provided in the reflector. The channels (16) of the cooling channel array may be formed from open channels in a surface of the substrate, the open channels being closed by the plate to create the channels.
Public/Granted literature
- US20180239252A1 REFLECTOR Public/Granted day:2018-08-23
Information query
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