- 专利标题: Substrate processing apparatus
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申请号: US14264698申请日: 2014-04-29
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公开(公告)号: US10216176B2公开(公告)日: 2019-02-26
- 发明人: Takashi Wada
- 申请人: ASM IP Holding B.V.
- 申请人地址: NL Almere
- 专利权人: ASM IP HOLDING B.V.
- 当前专利权人: ASM IP HOLDING B.V.
- 当前专利权人地址: NL Almere
- 代理机构: Studebaker & Brackett PC
- 主分类号: G05B19/418
- IPC分类号: G05B19/418 ; H01L21/677
摘要:
A substrate processing apparatus includes a plurality of arms used for transferring a substrate, a plurality of processing sections for processing the substrate, a recipe storage section storing at least one recipe for designating at least one of the plurality of arms as a usable arm and at least one of the plurality of processing sections as a usable processing section and for specifying processing conditions in the usable processing section, and a control unit for, according to the at least one recipe, controlling the plurality of arms and the plurality of processing sections so that a substrate is transferred using the usable arm and is processed in the usable processing section under the processing conditions.
公开/授权文献
- US20150309504A1 SUBSTRATE PROCESSING APPARATUS 公开/授权日:2015-10-29
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