Invention Grant
- Patent Title: Recessed hardmask used to form HAMR NFT heat sink
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Application No.: US14987058Application Date: 2016-01-04
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Publication No.: US10224064B2Publication Date: 2019-03-05
- Inventor: Anusha Natarajarathinam , Yongjun Zhao , Hui Brickner , Dongsung Hong
- Applicant: Seagate Technology LLC
- Applicant Address: US CA Cupertino
- Assignee: Seagate Technology LLC
- Current Assignee: Seagate Technology LLC
- Current Assignee Address: US CA Cupertino
- Agency: Hollingsworth Davis, LLC
- Main IPC: G11B5/127
- IPC: G11B5/127 ; G11B5/105 ; G11B5/31 ; G11B5/40 ; G11B5/00

Abstract:
A method involves depositing a near-field transducer on a substrate of a slider. The near-field transducer comprises a plate-like enlarged portion and a peg portion. A first hard stop extending from the near field transducer and an air bearing surface is formed. A heat sink is formed on the enlarged portion and the first hard stop. A dielectric material is deposited over the near-field transducer and the heat sink. A second hard stop is deposited on the dielectric material away from the air bearing surface. The second hard stop comprises a recess corresponding in size and location to the heat sink. The method involves milling at an oblique angle to the substrate between the first hard stop and second hard stop to cut through the heat sink at the angle. The recess of the second hard stop increases a milling rate over the heat sink compared to a second milling rate of the dielectric away from the heat sink.
Public/Granted literature
- US20170194022A1 RECESSED HARDMASK USED TO FORM HAMR NFT HEAT SINK Public/Granted day:2017-07-06
Information query
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