Invention Grant
- Patent Title: System and method for design based inspection
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Application No.: US16105430Application Date: 2018-08-20
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Publication No.: US10229241B2Publication Date: 2019-03-12
- Inventor: Ziv Parizat , Moshe Rosenweig
- Applicant: Applied Materials Israel Ltd.
- Applicant Address: IL Rehovot
- Assignee: Applied Materials Israel LTD.
- Current Assignee: Applied Materials Israel LTD.
- Current Assignee Address: IL Rehovot
- Agency: Lowenstein Sandler LLP
- Main IPC: G06F17/50
- IPC: G06F17/50 ; G03F1/84

Abstract:
Design information related to an irrelevant area of a first layer of semiconductor article may be received. The first layer may be manufactured by illuminating a lithographic mask during a lithographic process. First layer information associated with an outcome or an expected outcome of the illuminating of the lithographic mask during the lithographic process may be received. Information corresponding to a layout of an irrelevant area may be identified in the first layer information. A differentiating attribute that differentiates the layout of the irrelevant area from a layout of a relevant area of the first layer of the semiconductor article may be identified. The differentiating attribute may be used to determine one or more other irrelevant areas of the first layer of the semiconductor article.
Public/Granted literature
- US20180357357A1 SYSTEM AND METHOD FOR DESIGN BASED INSPECTION Public/Granted day:2018-12-13
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