Invention Grant
- Patent Title: Gas mixing apparatus
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Application No.: US13918033Application Date: 2013-06-14
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Publication No.: US10232324B2Publication Date: 2019-03-19
- Inventor: Kartik Shah , Kalyanjit Ghosh , Scott McClelland
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Agent Alan Taboada
- Main IPC: B01F3/02
- IPC: B01F3/02 ; B01F5/00 ; B01F5/06 ; H01J37/32

Abstract:
Embodiments of gas mixing apparatus are provided herein. In some embodiments, a gas mixing apparatus may include a container defining an interior volume, the container having a closed top and bottom and a sidewall having a circular cross section with respect to a central axis of the container passing through the top and bottom; a plurality of first inlets coupled to the container proximate the top of the container to provide a plurality of process gases to the interior volume of the container, the plurality of first inlets disposed such that a flow path of the plurality of process gases through the plurality of first inlets is substantially tangential to the sidewall of the container; and an outlet coupled to the container proximate the bottom of the container to allow the plurality of process gases to be removed from the interior volume of the container.
Public/Granted literature
- US20140014270A1 GAS MIXING APPARATUS Public/Granted day:2014-01-16
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